Dynamic micromechanics on silicon: Techniques and devices
- 1 October 1978
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 25 (10) , 1241-1250
- https://doi.org/10.1109/t-ed.1978.19259
Abstract
New fabrication procedures ate described for constructing thin, electrostatically deflectable SiO2membranes on a silicon wafer in a very controllable manner. Performance parameters of these membranes are analyzed and three examples of typical applications for the micromechanical structures are discussed: a light modulator array, a micromechanical voltage-controlled switch, and the measurement of the mechanical properties of thin insulating films unconstrained by the substrate. Since the lifetimes of the membranes can be very long (>1010cycles), their dimensions very small (8.3 µm long, 950 Å thick have been demonstrated), and the fabrication technique is simple and versatile, the potential applicability of such devices seems promising.Keywords
This publication has 13 references indexed in Scilit:
- The mirror-matrix tube: A novel light valve for projection displaysIEEE Transactions on Electron Devices, 1975
- Detection of Discontinuities in Passivating Layers on Silicon by NaOH Anisotropic EtchIBM Journal of Research and Development, 1972
- Microminiature ganged threshold accelerometers compatible with integrated circuit technologyIEEE Transactions on Electron Devices, 1972
- Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped SiliconJournal of the Electrochemical Society, 1971
- TELEVISION A New Schlieren Light Valve for Television ProjectionApplied Optics, 1970
- A Coherent Optical Computer System Using the Membrane Light ModulatorIEEE Transactions on Aerospace and Electronic Systems, 1970
- The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon SubstrateIBM Journal of Research and Development, 1968
- The resonant gate transistorIEEE Transactions on Electron Devices, 1967
- A Water-Amine-Complexing Agent System for Etching SiliconJournal of the Electrochemical Society, 1967
- The Fischer Large-Screen Projection SystemJournal of the Society of Motion Picture and Television Engineers, 1953