Theory of the rf sheath in the regime between the ion and electron plasma frequencies
- 23 January 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (4) , 317-319
- https://doi.org/10.1063/1.100997
Abstract
The collisionless space-charge sheath of a capacitivelyc oupled rf discharge is investigated in the frequency regime ωpi ≪ω≪ωpe . Assuming Boltzmann distributed electrons and starting from an existing charge exchange model of the presheath a self-consistent analysis is presented.Keywords
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