Reactions of Cu(hfac)2 and Co2(CO)8 during Chemical Vapor Deposition of Copper−Cobalt Films
- 17 July 1998
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 10 (8) , 2145-2151
- https://doi.org/10.1021/cm980031h
Abstract
No abstract availableKeywords
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