The Fraction of Sp3 Bonding in Carbon Thin Film Prepared Using Pulsed Laser Deposition

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Abstract
The fraction of s p 3 bonding in carbon thin film prepared using pulsed laser deposition with a KrF excimer laser is investigated. The carbon film deposited at the laser fluence of 0.2 J/cm2 has a graphitic structure. It is suggested that the neutral species of C3 is effective in the formation of this structure. The C+ ion increases with a laser fluence higher than 0.9 J/cm2 and the s p 3 bonding fraction in carbon film increases. The s p 3 fraction in the film also increases with a negative bias to the substrate. The impact of energetic C+ species to the substrate is attributed to the formation of s p 3 bonding.