Calculation of the shift of a thin marker layer in copper under ion bombardment
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 19-20, 659-661
- https://doi.org/10.1016/s0168-583x(87)80132-5
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Theoretical aspects of atomic mixing by ion beamsNuclear Instruments and Methods, 1981
- Distortion of depth profiles during ion bombardment II. Mixing mechanismsNuclear Instruments and Methods, 1981
- Recoil mixing in solids by energetic ion beamsNuclear Instruments and Methods, 1980
- Distortion of depth profiles during sputteringNuclear Instruments and Methods, 1980