High resolution imaging and lithography with hard x rays using parabolic compound refractive lenses
- 1 March 2002
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 73 (3) , 1640-1642
- https://doi.org/10.1063/1.1445827
Abstract
Parabolic compound refractive lenses are high quality optical components for hard x rays. They are particularly suited for full field imaging, with applications in microscopy and x-ray lithography. Taking advantage of the large penetration depth of hard x rays, the interior of opaque samples can be imaged with submicrometer resolution. To obtain the three-dimensional structure of a sample, microscopy is combined with tomographic techniques. In a first hard x-ray lithography experiment, parabolic compound refractive lenses have been used to project the reduced image of a lithography mask onto a resist. Future developments are discussed.Keywords
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