SIMPLE TECHNIQUE FOR VERY THIN SiO2 FILM THICKNESS MEASUREMENTS
- 15 October 1967
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 11 (8) , 257-259
- https://doi.org/10.1063/1.1755124
Abstract
The thickness of films (2 on silicon ``thickness gauge.'' Film thicknesses can be estimated to an accuracy of about±30 Å for thicknesses less than 150 Å and±50 Å for thicknesses between 150 Å and 900 Å.Keywords
This publication has 2 references indexed in Scilit:
- Refractive Index of SiO2 Films Grown on SiliconJournal of Applied Physics, 1965
- Thickness measurement of silicon dioxide layers by ultraviolet-visible interference methodSolid-State Electronics, 1964