Scanning capacitance microscopy investigations of focused ion beam damage in silicon
- 1 July 2003
- journal article
- Published by Elsevier in Physica E: Low-dimensional Systems and Nanostructures
- Vol. 19 (1-2) , 178-182
- https://doi.org/10.1016/s1386-9477(03)00330-8
Abstract
No abstract availableKeywords
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