Equivalent circuit for ion implanted counterdoped layers as determined by MOS admittance and crosstalk measurements

This publication has 4 references indexed in Scilit:

• Characterization of MOS structures with buried layers
  Physica Status Solidi (a), 1978
• Determination of impurity and mobility distributions in epitaxial semiconducting films on insulating substrate by C-V and Q-V analysis
  Applied Physics Letters, 1974
• Carrier mobilities in silicon empirically related to doping and field
  Proceedings of the IEEE, 1967
• Lateral AC current flow model for metal-insulator-semiconductor capacitors
  IEEE Transactions on Electron Devices, 1965