Integration of fluidically self-assembled optoelectronic devices using a silicon-based process
- 1 November 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (11) , 1321-1323
- https://doi.org/10.1109/68.473485
Abstract
Fluidic self-assembly (FSA) is a technique for efficient wafer-scale placement of large numbers of small or microscopic devices into receptor sites etched in a substrate. This paper reports the first complete planar process for integrating optoelectronic devices on a silicon wafer using fluidic self-assembly. Methods for bonding the devices into the receptor sites and subsequently contacting, planarizing, and interconnecting them are outlined.Keywords
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