The mechanical properties of DLC and fluorinated DLC films deposited using unbalanced magnetron sputter ion plating method
- 1 September 1998
- journal article
- Published by Elsevier in Scripta Materialia
- Vol. 39 (7) , 839-845
- https://doi.org/10.1016/s1359-6462(98)00265-6
Abstract
No abstract availableKeywords
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