Design and fabrication of a microminiature thermocouple array for far-infrared radiation detection
- 30 April 1990
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 11 (1-4) , 83-86
- https://doi.org/10.1016/0167-9317(90)90077-7
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Fabrication and electrical, mechanical and thermal properties of sub-micron free-standing devicesMicroelectronic Engineering, 1989
- Fabrication and phonon transport studies in nanometer scale free-standing wiresJournal of Vacuum Science & Technology B, 1987
- Self-heated thermocouples for far-infrared detectionApplied Physics Letters, 1982
- A batch-fabricated silicon thermopile infrared detectorIEEE Transactions on Electron Devices, 1982