Fabrication and electrical, mechanical and thermal properties of sub-micron free-standing devices
- 1 May 1989
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 9 (1-4) , 337-340
- https://doi.org/10.1016/0167-9317(89)90073-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Fabrication of free-standing single-crystal silicon wiresApplied Physics Letters, 1988
- Fabrication and phonon transport studies in nanometer scale free-standing wiresJournal of Vacuum Science & Technology B, 1987
- Electric field heating of supported and free-standing AuPd fine wiresSolid State Communications, 1986
- Fabrication of ultra-thin free-standing wires of silicon nitrideElectronics Letters, 1984