Vacuum arc arrays for intense metal ion beam injectors
- 1 May 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 10-11, 792-795
- https://doi.org/10.1016/0168-583x(85)90109-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Repetitively pulsed metal ion beams for ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- The Interaction of Vacuum Arc Ion Currents with Axia I Magnetic FieldsIEEE Transactions on Plasma Science, 1983
- Applications for ion implantation as a surface treatment process in production engineeringRadiation Effects, 1979
- The cathode spot of a vacuum arcSoviet Physics Uspekhi, 1978