Automatic concentric shaft reflectometer for use in the vacuum uv
- 1 September 1976
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 47 (9) , 1065-1068
- https://doi.org/10.1063/1.1134819
Abstract
A vacuum uv reflectometer is described which makes use of a highly reproducible stepping motor drive system. The concentric shaft design eliminates many alignment problems common to other systems and makes possible a single flange mounting. The pulsed drive system is particularly well suited to automation, both from the standpoint of sample position control and the application of signal averaging techniques to improve the precision of reflectance measurements. Examples of both manual and automatic control systems are presented.Keywords
This publication has 14 references indexed in Scilit:
- Slope method for determining extinction coefficients*Journal of the Optical Society of America, 1973
- Optical Properties of MgO and MgF2 in the Extreme Ultraviolet RegionJournal of Applied Physics, 1972
- Ultrahigh Vacuum Reflectometer for Use with Extreme Ultraviolet Synchrotron RadiationReview of Scientific Instruments, 1969
- Angle-Doubler for Reflectance Measurements in Evacuated SystemsReview of Scientific Instruments, 1968
- On the Cause of Errors in Reflectance vs Angle of Incidence Measurements and the Design of Reflectometers to Eliminate the ErrorsApplied Optics, 1967
- Errors in using the Reflectance vs Angle of Incidence Method for Measuring Optical Constants*Journal of the Optical Society of America, 1965
- Apparatus for the Measurement of Vacuum Ultraviolet Optical Properties of Freshly Evaporated Films before Exposure to AirJournal of the Optical Society of America, 1961
- Photoelectric Measurement of Polarized Light by Means of an ADP Polarization Modulator II Photoelectric Elliptic PolarimeterJournal of the Optical Society of America, 1961
- Reflectance-Increasing Coatings for the Vacuum Ultraviolet and Their Applications*Journal of the Optical Society of America, 1960
- On Calculating the Optical Constants from Reflection CoefficientsJournal of the Optical Society of America, 1939