Current research activities in the field of multilayers for soft X-rays in Japan
- 1 January 1988
- journal article
- Published by EDP Sciences in Revue de Physique Appliquée
- Vol. 23 (10) , 1711-1726
- https://doi.org/10.1051/rphysap:0198800230100171100
Abstract
The present status of studies on soft X-ray multilayers in Japan is briefly reviewed. This includes the design concepts, optical constants of substrates and thin films, fabrication techniques, evaluation methods, and some applicationsKeywords
This publication has 19 references indexed in Scilit:
- Float polishing of optical materialsApplied Optics, 1987
- Soft x-ray reflection from SiC, TiC, and WC mirrorsApplied Optics, 1986
- Roughness Measurement of X-Ray Mirror SurfacesJapanese Journal of Applied Physics, 1986
- Optical Profilers For Surface RoughnessPublished by SPIE-Intl Soc Optical Eng ,1985
- Molybdenum-silicon multilayer mirrors for the extreme ultravioletApplied Optics, 1985
- Layered synthetic microstructures as Bragg diffractors for X rays and extreme ultraviolet: theory and predicted performanceApplied Optics, 1981
- Optical heterodyne profilometryApplied Optics, 1981
- Low Energy X-Ray Interactions: Photoionization, Scattering, Specular and Bragg ReflectionAIP Conference Proceedings, 1981
- X-ray and far uv multilayer mirrors: principles and possibilitiesApplied Optics, 1977
- Bowl Feed Technique for Producing Supersmooth Optical SurfacesApplied Optics, 1966