Heteroepitaxial Growth of CeO2(001) Films on Si(001) Substrates by Pulsed Laser Deposition in Ultrahigh Vacuum
- 1 June 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (6B) , L1136
- https://doi.org/10.1143/jjap.30.l1136
Abstract
Pulsed laser deposition in ultrahigh vacuum (UHV) was applied to the epitaxial growth of CeO2 film on Si(001). Although the direct deposition of CeO2(001) on Si(001) was unsuccessful, the desired epitaxy was achieved by inserting the growth of a SrTiO3 layer. The formation of a CeO2(001)//SrTiO3(001)//Si(001) layered structure was verified by reflection high-energy electron diffraction analysis of the growing surface at a temperature between 650 and 700°C in UHV. In addition to lattice matching, chemical interaction at the growing surface had a decisive effect on the epitaxy and orientation of growing ceramic lattices.Keywords
This publication has 8 references indexed in Scilit:
- Epitaxial relations between i n s i t u superconducting YBa2Cu3O7−x thin films and BaTiO3/MgAl2O4/Si substratesJournal of Applied Physics, 1990
- Sputter deposition of YBa2Cu3O7−x films on Si at 500 °C with conducting metallic oxide as a buffer layerApplied Physics Letters, 1990
- In Situ RHEED Observation of CeO2 Film Growth on Si by Laser Ablation Deposition in Ultrahigh-VacuumJapanese Journal of Applied Physics, 1990
- Crystalline Qualities and Critical Current Densities of As-Grown Ba2YCu3Ox Thin Films on Silicon with Buffer LayersJapanese Journal of Applied Physics, 1990
- Epitaxial growth of CeO2 layers on siliconApplied Physics Letters, 1990
- Multilayer high Tc thin film structures fabricated by pulsed laser deposition of Y–Ba–Cu–OJournal of Materials Research, 1989
- As-Grown Preparation of Superconducting Epitaxial Ba2YCu3Ox Thin Films Sputtered on Epitaxially Grown ZrO2/Si(100)Japanese Journal of Applied Physics, 1989
- Thermodynamic studies of the phase relationships of nonstoichiometric cerium oxides at higher temperaturesJournal of Solid State Chemistry, 1976