Application of low-energy ion beams
- 1 April 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 3 (1-3) , 275-278
- https://doi.org/10.1016/0168-583x(84)90377-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Determination of Arsenic, Antimony, and Bismuth in Silicon Using 200 keV α-Particle BackscatteringPhysica Status Solidi (a), 1982
- Depth profiling in the near surface region by low energy PIXENuclear Instruments and Methods in Physics Research, 1982
- K-shell ionization by low-velocity ionsPhysical Review A, 1981
- Sensitivity in light element analysis by 2 MeV and 150 keV proton and photon induced X-raysNuclear Instruments and Methods, 1978