SiC thin-film thermistor
- 1 May 1982
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 15 (5) , 520-524
- https://doi.org/10.1088/0022-3735/15/5/011
Abstract
A thermistor using a sputtered SiC film has been developed as a temperature-sensing device which is able to detect temperatures accurately over the wide range of 30-300 degrees C. The thermistor has a unique characteristic in that the B constant increases linearly with an increase of temperature. The typical values of the B constant increase from 1950K at 50 degrees C to 3080K at 250 degrees C. From this unique characteristic, the temperature dependence of resistance was calculated with high accuracy by an experimental equation. The thermistor consists of a thermistor element and a package. The thermistor element comprises the SiC film temperature sensor. The package comprises a small glass tube in which the thermistor element is sealed hermetically. The characteristics of the thermistor are very stable for long periods under various test conditions.Keywords
This publication has 7 references indexed in Scilit:
- Effects of Target Materials on the Structural Properties of Sputtered SiC FilmsJournal of the Electrochemical Society, 1980
- Highly-reliable temperature sensor using rf-sputtered SiC thin filmReview of Scientific Instruments, 1979
- Structures and physical properties of sputtered amorphous SiC filmsJournal of Electronic Materials, 1979
- Thin‐film platinum resistance thermometers: Fabrication and useJournal of Vacuum Science and Technology, 1977
- Thin film thermistorsJournal of Physics E: Scientific Instruments, 1975
- Single−crystal β−SiC films by reactive sputteringApplied Physics Letters, 1975
- Preparation and Properties of Noncrystalline Silicon Carbide FilmsJournal of Applied Physics, 1968