Highly-reliable temperature sensor using rf-sputtered SiC thin film
- 1 September 1979
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 50 (9) , 1084-1088
- https://doi.org/10.1063/1.1135988
Abstract
A SiC thin-film thermistor for high-temperature use has been developed by using rf-sputtered SiC thin films. This thermistor can be used for industrial and consumer use within an operating temperature range of −100 to 450 °C. By using SiC thin films, the thermistor maintains high electrical stability. The resistance change is less than 3% after exposure to heat at 400 °C for 2000 h. In addition, the film growth technique made possible the production of a high-accuracy thermistor, i.e., thermistor coefficient <±0.5%, thermistor resistance <±1.5%.Keywords
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