Self-aligned oxidised porous silicon optical waveguideswith reduced loss
- 13 April 2000
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 36 (8) , 722-723
- https://doi.org/10.1049/el:20000490
Abstract
A report is presented into the fabrication of self-aligned oxidised porous silicon optical waveguides, the optical losses of which at both visible and infrared wavelengths are significantly reduced, to around the 1 dBcm-1 limit widely considered as critical for application success.Keywords
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