Data compilation for depth distribution of ion-induced damage and ion-implanted atoms

Publisher Website

1 December 1984

journal article
Published by Elsevier in Journal of Nuclear Materials

Vol. 128-129, 1001-1005
https://doi.org/10.1016/0022-3115(84)90504-x

Abstract

No abstract available

Keywords

This publication has 3 references indexed in Scilit:

Ranges of ${}^{15}N^{+}$ ions in ten metals measured by ( $p, α γ$ ) resonance broadening
Physical Review B, 1978
Depth distribution of energy deposition by ion bombardment
Computer Physics Communications, 1974
Range and stopping-power tables for heavy ions
Atomic Data and Nuclear Data Tables, 1970