Observations on the operation of a planar magnetron sputtering system by target erosion patterns
- 17 August 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 151 (3) , 373-381
- https://doi.org/10.1016/0040-6090(87)90136-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Target Erosion Pattern in Planar Magnetron SputteringJapanese Journal of Applied Physics, 1982
- Self-sputtering phenomena in high-rate coaxial cylindrical magnetron sputteringJournal of Vacuum Science and Technology, 1977
- Electron effects in magnetron sputteringJournal of Vacuum Science and Technology, 1976