Structural transitions in hard Si-based TiN coatings: the effect of bias voltage and temperature
- 1 September 2001
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 146-147, 274-279
- https://doi.org/10.1016/s0257-8972(01)01395-0
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
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