TE/TM mode selective channel waveguides in GaAs/AlAs superlattice fabricated by SiO2 cap disordering
- 1 January 1990
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (1) , 19-20
- https://doi.org/10.1063/1.103274
Abstract
Novel structure TE/TM mode selective optical channel waveguides are proposed and fabricated in GaAs/AlAs superlattices (SLs) using impurity‐free disordering induced by SiO2 cap annealing. The disordered SL regions are found to be useful as low‐loss waveguides even at a wavelength close to the absorption edge of the as‐grown SL. By observing the near‐field patterns, it is confirmed that these channel waveguides could selectively confine TE or TM polarized light.Keywords
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