Production of Ultra-Thin Metal Films Using Neutral Cluster Beams
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Low temperature epitaxy by ionized-cluster beamJournal of Vacuum Science & Technology A, 1986
- Fundamentals of Ultrasonic SpectroscopyJapanese Journal of Applied Physics, 1986
- Generation of supported metal clusters of controlled sizeJournal of Molecular Catalysis, 1983