Preparation of Y-Ba-Cu-O high T c superconducting thin films by plasma-assisted organometallic chemical vapor deposition
- 10 July 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (2) , 194-196
- https://doi.org/10.1063/1.102404
Abstract
Thin films of the high Tc superconducting Y‐Ba‐Cu metal oxide have been prepared for the first time by plasma‐assisted organometallic chemical vapor deposition using β‐diketonate chelates of Y, Ba, and Cu, Y(C11H19O2)3, Ba(C11H19O2)2, and Cu(C11H19O2)2 as starting materials, followed by post‐annealing under a reduced pressure of oxygen stream. X‐ray diffraction spectra indicate that the films deposited on the yttria‐stabilized zirconia (YSZ) substrate have a significant preferential orientation of the crystallite c axis being perpendicular to the substrate surface. Four‐probe resistivity measurements reveal the temperature of the onset of superconductivity at 91.6 K and zero resistance by 78.5 K.Keywords
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