Micromachined flow sensors—a review
- 1 March 1997
- journal article
- review article
- Published by Elsevier in Flow Measurement and Instrumentation
- Vol. 8 (1) , 7-16
- https://doi.org/10.1016/s0955-5986(97)00019-8
Abstract
No abstract availableKeywords
This publication has 38 references indexed in Scilit:
- Two-dimensional integrated gas flow sensors by CMOS IC technologyJournal of Micromechanics and Microengineering, 1995
- Microfluidics-a reviewJournal of Micromechanics and Microengineering, 1993
- A liquid velocity sensor based on the hot-wire principleSensors and Actuators A: Physical, 1993
- An integrated sensor for invasive blood-velocity measurementSensors and Actuators A: Physical, 1993
- A dual-bit low-offset sigma delta analog-to-digital converter for integrated smart sensorsSensors and Actuators A: Physical, 1993
- Integrated smart two-dimensional thermal flow sensor with Seebeck-voltage-to-frequency conversionSensors and Actuators A: Physical, 1992
- The thermal modelling of a flow sensor based on differential convective heat transferSensors and Actuators A: Physical, 1991
- The dynamic mechanical characteristics of a resonating microbridge mass-flow sensorSensors and Actuators A: Physical, 1991
- Microminiaturized thermistor arrays for temperature gradient, flow and perfusion measurementsSensors and Actuators A: Physical, 1991
- Integrated silicon anemometerElectronics Letters, 1974