Amorphous silicon air-gap resonators on large-area substrates
- 7 August 2000
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 77 (6) , 907-909
- https://doi.org/10.1063/1.1306912
Abstract
Air-gap resonators composed of bridges of hydrogenated amorphous silicon and aluminum bilayers on glass and polyethylene terephthalate substrates are realized using surface micromachining techniques. The resonance frequency of structures on plastic substrates was found to vary inversely with the square of the length of the bridge span. On glass substrates, this dependence is seen for lengths >100 μm, while for lengths <100 μm, a decrease in the frequency is attributed to compressive stress. Resonance frequencies of ∼500 kHz to ∼2 MHz were measured in bridges with lengths from 160 μm down to ∼80 μm.Keywords
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