Metalorganic vapor phase epitaxy of InP using the novel P-source ditertiarybutyl phosphine (DitBuPH)
- 1 March 1996
- journal article
- research article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 25 (3) , 443-448
- https://doi.org/10.1007/bf02666618
Abstract
No abstract availableKeywords
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