Two-dimensional direct simulation Monte Carlo (DSMC) of reactive neutral and ion flow in a high density plasma reactor
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 23 (4) , 581-590
- https://doi.org/10.1109/27.467978
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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