Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. II. Comparisons with laboratory measurements of electron energy distribution functions

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Abstract
For pt.I see ibid., vol.2, no.4, p.261-72 (1993). Bi-Maxwellian electron energy distribution functions (EEDFS) have been measured experimentally in argon RF discharges at 13.56 MHz by Godyak et al. (Plasma Sources Sci. Technol. 1 36 (1992)). The observed EEDFS at low pressures had very-low-energy and high-energy components. We show particle-in-cell Monte-Carlo (PIC-MCC) simulations, which produce the same EEDFS. Excellent agreement is obtained between the effective low and high electron temperatures in simulations and those measured in the laboratory. Our simulations, with the same physical parameters as in the laboratory, obtain the same transition point in the electron heating mode, from stochastically dominated heating at low pressures to ohmically dominated heating at high pressures.