Ceramic microtubes self-formed at room temperature that exhibit a large bending stress
- 1 October 2000
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 88 (7) , 4434-4436
- https://doi.org/10.1063/1.1290703
Abstract
We have investigated the aluminum nitride microtubes made of aluminum nitride thin film. Aluminum nitride thin film deposited on aluminum foil forms microtubes of itself at room temperature when the aluminum foil is dissolved in hydrochloric acid solution. The aluminum nitride microtubes exhibit a large bending stress of 1100±94 megapascals. The bending stress is more than three times larger than the bending strength of aluminum nitride bulk. The diameter of the microtubes is proportional to the film thickness. The bending stress is independent of the film thickness and is fixed.This publication has 12 references indexed in Scilit:
- Preparation and characterization of SiC microtubesApplied Catalysis A: General, 1999
- Preparation of ceria thin films and microtubes by vapor-phase deposition using NiO as oxygen sourceThin Solid Films, 1998
- Statistical approach for optimizing sputtering conditions of highly oriented aluminum nitride thin filmsThin Solid Films, 1998
- Laser-assisted formation of metallic oxide microtubesJournal of Materials Research, 1997
- The first crystalline hexagonal Si3N4 microtubesAdvanced Materials, 1996
- MoS2 as microtubesApplied Physics Letters, 1996
- ZnO microtubesJournal of Materials Research, 1994
- Dependence of Substrate and Its Temperature on Residual Stress in AlN Films Deposited by Sputtering.Journal of the Society of Materials Science, Japan, 1993
- Stress-related effects in thin filmsThin Solid Films, 1989
- Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatingsJournal of Vacuum Science and Technology, 1974