Bombarding effects by ionized cluster beams
- 1 June 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 33 (1-4) , 108-111
- https://doi.org/10.1016/0168-583x(88)90524-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Formation mechanism of large clusters from vaporized solid materialThe Journal of Physical Chemistry, 1987
- Cluster-beam deposition of thin films: A molecular dynamics simulationJournal of Applied Physics, 1987
- Ionized cluster beam techniqueVacuum, 1986