Separation of effects of oxide-trapped charge and interface-trapped charge on mobility in irradiated power MOSFETs

Abstract
An effective approach to separating the effects of oxide-trapped charge and interface-trapped charge on mobility degradation in irradiated MOSFETs is demonstrated. It is based on analyzing mobility data sets which have different functional relationships between the radiation-induced oxide-trapped charge and interface-trapped charge; Separation of effects of oxide-trapped charge and interface-trapped charge is possible only if these two trapped charge components are not linearly dependent. A significant contribution of oxide-trapped charge to mobility degradation is demonstrated add quantified.