Application of a semiconductor tip to capacitance microscopy
- 27 July 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (4) , 544-546
- https://doi.org/10.1063/1.121927
Abstract
A semiconductor tip has been applied to the scanning capacitance microscopy (SCM). Local electrostatic fields are measured through depletion of carriers at the tip end. A Si microcantilever with the sharp end is employed. This SCM technique has been used in a capacitance observation of a dielectric/electrode sample. Potentiometry using this technique is demonstrated in an experiment of charge injection recording on a polymer film.Keywords
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