Measurement of the roughness of supersmooth surfaces using an electron mirror interference microscope
- 1 October 1979
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 12 (10) , 941-944
- https://doi.org/10.1088/0022-3735/12/10/014
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Laser heterodyne apparatus for roughness measurements of polished surfacesApplied Optics, 1978
- Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometerApplied Optics, 1976
- Quantitative surface profilimetry applied to sputter ion bombarded sapphireJournal of Vacuum Science and Technology, 1975
- A simple scatter method for optical surface roughness and slope measurements. Roughness of polished fused silicaJournal of Physics E: Scientific Instruments, 1970
- A quantum mechanical treatment of the mirror electron microscopeJournal of Engineering Mathematics, 1970
- The application of fringes of equal chromatic order to the assessment of the surface roughness of polished fused silicaJournal of Physics E: Scientific Instruments, 1970
- Beobachtungen und Messungen an Biprisma-Interferenzen mit ElektronenwellenThe European Physical Journal A, 1956