Nucleation of Epitaxial SiC on Si Surfaces
- 1 October 1966
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 37 (11) , 4288-4289
- https://doi.org/10.1063/1.1708017
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- On SiC contamination of silicon epitaxial waferSolid-State Electronics, 1964
- Method of preparing Si and Ge specimens for examination by transmission electron microscopyBritish Journal of Applied Physics, 1962