Diamond crystallite formation on Si(100) from the gas phase: Seeding or heterogeneous nucleation?
- 14 September 1992
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (11) , 1287-1289
- https://doi.org/10.1063/1.107567
Abstract
Well separated particles of diamond have been obtained on Si(100) surface by the hot filament chemical vapor deposition technique after scratching by diamond paste. Consecutive depositions, one at a higher and one at lower temperature, or at different CH4 contents of the gas mixture, together with a kinetic analysis based on the particle size distribution function, allow one to decide about the relative importance of heterogeneous nucleation and of seeding.Keywords
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