Thermodynamic and experimental study of CVD of non-stoichiometric titanium nitride from TiCl4N2-H2 mixtures
- 1 January 1988
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 23 (1) , 135-140
- https://doi.org/10.1007/bf01174044
Abstract
No abstract availableKeywords
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