Large Area Photochemical Dry Etching of Polymers with Incoherent Excimer UV Radiation

This publication has 7 references indexed in Scilit:

• Investigation of the mechanism of the UV-induced palladium deposition process from thin solid palladium acetate films
  Applied Surface Science, 1990
• Silent discharges for the generation of ultraviolet and vacuum ultraviolet excimer radiation
  Pure and Applied Chemistry, 1990
• UV excimer radiation from dielectric-barrier discharges
  Applied Physics B Laser and Optics, 1988
• Mechanism of the ultraviolet laser ablation of polymethyl methacrylate at 193 and 248 nm: laser-induced fluorescence analysis, chemical analysis, and doping studies
  Journal of the Optical Society of America B, 1986
• Optical absorption of some polymers in the region 240–170 nm
  Applied Physics Letters, 1986
• Modification of polymer surfaces by far-ultraviolet radiation of low and high (laser) intensities
  Polymer, 1985
• DEGRADATION OF POLYMETHYL METHACRYLATE BY ULTRAVIOLET LIGHT
  The Journal of Physical Chemistry, 1961