Real-time stress evolution during Si1-xGex Heteroepitaxy: Dislocations, islanding, and segregation
- 1 September 1997
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 26 (9) , 969-979
- https://doi.org/10.1007/s11664-997-0233-2
Abstract
No abstract availableKeywords
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