Abstract
Surface properties of Fe-doped and undoped InP samples as-grown and after various chemical treatments have been studied using surface photovoltage spectroscopy. Two surface states, a deep acceptor level at Ec-0.79 eV and a shallow donor at Ev+1.18 eV, are observed as a result of Fe doping. Surface states observed on undoped surfaces are related to different native oxide compositions produced by chemical treatments.