Performance improvement of a vibration-powered electromagnetic generator by reduced silicon surface roughness
- 26 June 2007
- journal article
- research article
- Published by Elsevier in Materials Letters
- Vol. 62 (4-5) , 651-654
- https://doi.org/10.1016/j.matlet.2007.06.050
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applicationsMicrosystem Technologies, 2006
- A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline siliconJournal of Micromechanics and Microengineering, 2003
- Mechanical property measurements of nanoscale structures using an atomic force microscopeUltramicroscopy, 2002
- Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFMJournal of Microelectromechanical Systems, 2000
- Controlling and Testing the Fracture Strength of Silicon on the MesoscaleJournal of the American Ceramic Society, 2000
- Arsenic doped buried plate characterization in deep trenches for a 0.25 μm complementary metal–oxide–semiconductor technology by chemical etchingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Characterization of large-area arrays of nanoscale Si tips fabricated using thermal oxidation and wet etching of Si pillarsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Slow Crack Growth in Single-Crystal SiliconScience, 1992
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Chemical Etching of Silicon: IV . Etching TechnologyJournal of the Electrochemical Society, 1976