Crystallography and structural evolution of cubic boron nitride films during bias sputter deposition
- 1 September 2000
- journal article
- Published by Elsevier in Acta Materialia
- Vol. 48 (14) , 3745-3759
- https://doi.org/10.1016/s1359-6454(00)00159-2
Abstract
No abstract availableKeywords
This publication has 43 references indexed in Scilit:
- Crystallographic texture in cubic boron nitride thin filmsJournal of Applied Physics, 1996
- On the role of ions in the formation of cubic boron nitride films by ion-assisted depositionJournal of Materials Research, 1994
- Evidence for rhombohedral boron nitride in cubic boron nitride films grown by ion-assisted depositionPhysical Review B, 1994
- Generation and applications of compressive stress induced by low energy ion beam bombardmentJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Phase evolution in boron nitride thin filmsJournal of Materials Research, 1993
- Phase control of cubic boron nitride thin filmsJournal of Applied Physics, 1992
- The Microstructure of Boron Nitride Thin FilmsMaterials Science Forum, 1991
- Dislocations, twins, and grain boundaries in CVD diamond thin films: Atomic structure and propertiesJournal of Materials Research, 1990
- Electron microscopic characterization of diamond films grown on Si by bias-controlled chemical vapor depositionJournal of Materials Research, 1990
- Turbostratic1 Boron Nitride, Thermal Transformation to Ordered-layer-lattice Boron NitrideJournal of the American Chemical Society, 1962