Formation of self-aligned cobalt silicide in normal flow nitrogen furnace
- 1 January 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 207 (1-2) , 75-81
- https://doi.org/10.1016/0040-6090(92)90105-k
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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