Silicon oxynitride; a material for GRIN optics
- 15 March 1982
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 21 (6) , 1069-1072
- https://doi.org/10.1364/ao.21.001069
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 24 references indexed in Scilit:
- Oxynitride glasses and glass-ceramicsJournal of Non-Crystalline Solids, 1980
- Gradient-index optics: a reviewApplied Optics, 1980
- Silicon Metal Oxynitride GlassesJournal of the American Ceramic Society, 1978
- Physicochemical Properties of Chemical Vapor‐Deposited Silicon Oxynitride from a SiH4 ‐ CO 2 ‐ NH 3 ‐ H 2 SystemJournal of the Electrochemical Society, 1978
- Oxynitride Deposition Kinetics in a SiH4 ‐ CO 2 ‐ NH 3 ‐ H 2 SystemJournal of the Electrochemical Society, 1977
- Silicon Oxynitride Films from the NO-NH[sub 3]-SiH[sub 4] ReactionJournal of the Electrochemical Society, 1973
- Optical Properties of Silicon NitrideJournal of the Electrochemical Society, 1973
- Solid Solution in the Silicon Nitride-Silicon Dioxide SystemJournal of the Electrochemical Society, 1969
- Properties of Si[sub x]O[sub y]N[sub z] Films on SiJournal of the Electrochemical Society, 1968
- Films of Silicon Nitride-Silicon Dioxide MixturesJournal of the Electrochemical Society, 1968