Properties of AlN films grown at 350 K by gas-phase excimer laser photolysis
- 15 November 1995
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 78 (10) , 6000-6005
- https://doi.org/10.1063/1.360606
Abstract
No abstract availableThis publication has 39 references indexed in Scilit:
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