Effects of substrate temperature on the structure and properties of reactive pulsed laser deposited CNx films
- 1 July 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 280 (1-2) , 1-4
- https://doi.org/10.1016/0040-6090(96)00853-x
Abstract
No abstract availableKeywords
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