Closed-loop modeling of silicon nanophotonics from design to fabrication and back again
- 1 September 2008
- journal article
- Published by Springer Nature in Optical and Quantum Electronics
- Vol. 40 (11) , 801-811
- https://doi.org/10.1007/s11082-008-9265-y
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Dr.LiTHO: a development and research lithography simulatorPublished by SPIE-Intl Soc Optical Eng ,2007
- Linear and Nonlinear Nanophotonic Devices Based on Silicon-on-Insulator Wire WaveguidesJapanese Journal of Applied Physics, 2006
- Modelling of Photonic Wire Bragg GratingsOptical and Quantum Electronics, 2006
- Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technologyJournal of Lightwave Technology, 2005
- The Fully Informed Particle Swarm: Simpler, Maybe BetterIEEE Transactions on Evolutionary Computation, 2004
- Losses in single-mode silicon-on-insulator strip waveguides and bendsOptics Express, 2004
- Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithographyIEEE Journal of Selected Topics in Quantum Electronics, 2002
- S-matrix oriented CAD-tool for simulating complex integrated optical circuitsIEEE Journal of Selected Topics in Quantum Electronics, 1996
- PROLITH: A Comprehensive Optical Lithography ModelPublished by SPIE-Intl Soc Optical Eng ,1985
- Method for the calculation of partially coherent imageryApplied Optics, 1978